Applications: Silicon wafer, etc
Due to the ultra-thinning of wafers, loss of gettering performance becomes a major concern. Gettering DP is a new solution which realizes high die strength and good gettering performance at the same time using DISCO’s unique dry polishing process.This chemical-free process has a low environmental impact and polishes thin wafers with a simple process that does not involve using a slurry.
Gettering DP wheels are offered in two types according to the application. In contrast to the standard GA-type, the MZ-type is a DP wheel which increases the die strength of the polished wafer, allowing for an even thinner finish. However, the MZ-type requires detailed polishing condition selection according to the workpiece. Please contact us if you wish to use the MZ-type.
|GA*** type||Standard gettering DP wheel|
|MZ*** type||A gettering DP wheel which increases die strength more than the GA-type, realizing an even thinner finish|
* Finish thickness: 25 µm Process: DBG （Dicing Before Grinding）
The amount of precipitated Cu detected on the polished surface of a mirror wafer exceeds 1.0 E11 after a copper solution is applied to the surface. In contrast, the amount of precipitated Cu detected on the backside of a wafer polished with a Gettering DP is below the detection limit, thus indicating that the surface had a gettering effect.
To quantitatively measure the gettering effect, samples were contaminated with a Cu solution. The Cu was diffused at 350 ºC for 3 hours and then analyzed using TXRF (Total-Reflection X-ray Fluorescence). Take a Gettering DP polished wafer for example; the amount of Cu detected on the opposite surface (mirror surface) is analyzed with TXRF after diffusing the Cu on the polished surface and contaminating with Cu.
※ Detectable range at below 0.5E10 atoms/cm2
Please contact a DISCO representative with your product needs such as type, wheel size, and quantity.
When you place the first order with us, please explain application information such as materials to grind, sizes, machine, type, and other specification.
We are ready to help you to determine which is our most appropriate product type for your application.
* Due to improvements in our products, it is possible that product specifications may be changed without advanced notice.
Please confirm the product specifications with a DISCO representative.
To use these DISCO blades and wheels (hereafter precision tooling) safely
Please read carefully and follow the instructions below to prevent any accidents or injuries.