HogoMax SeriesWater-soluble protective film for laser processing
Highly purified water-soluble protective film for semiconductor processes
- HogoMax is a water-soluble resin that prevents particles from adhering to the wafer surface.
- By applying HogoMax to a laser processed surface using a spin coater, adhesion of debris can be greatly reduced, contributing to improved device reliability.
- In addition, the film can be removed after laser processing simply through cleaning with deionized water.
Full-auto processing from coating to cleaning
All processes, from HogoMax coating and laser processing to cleaning with deionized water, can be performed in fully automatic operation. (Applicable models: DFL7161 and DFL7160)
Lineup
| Type | Line-up | Viscosity[mPa・s] |
|---|---|---|
| HogoMax152 | -10 | 52 |
| HogoMax103 | -15 | 76 |
| -10 | 230 | |
| HogoMax106 | -10 | 76 |
| HogoMax003 | -15 | 65 |
| -10 | 217.5 | |
| HogoMax002 | 60cP | 60 |
| 8.0cP | 8.0 | |
| 3.8cP | 3.8 |
HogoMax SeriesWater-soluble protective film for laser processing
Contact
Please feel free to contact us with any questions or inquiries.