The DFD6361 enhances throughput in two distinct ways. DISCO’s facing dual design and a reduction in distance between the blades help to control total cut time, while high-magnification microscopes (standard) and non-contact setup sensors (option) for both Z1 and Z2 reduce the time required for non-dicing sequences, such as kerf check and blade setup.
DFD6361 offers highly consistent and dependable cut quality through the new Synchro Spindle™ featuring superior radial rigidity. An atomizing nozzle cleaning mechanism can also be installed in the spinner unit as an option to effectively clean wafers after dicing (Patent no.3410385).
Auto-open/close wheel cover and spindle shaft-lock feature make blade replacement quick and easy. In addition, the condition monitor relays processing status and key equipment information in real time. DFD6361 also has a cutting water flow rate control feature, making it possible to manage the flow rate on the screen. An adjustable LCD touch screen with GUI (Graphical User Interface) have also been adopted.
The 1.2 kW spindle (standard) features superior rigidity. A center thrust design gives the 1.8 kW spindle (option, uses 2 ” blades) and the 2.2 kW spindle (option, uses 3 ” blades) extra rigidity for processing glass, ceramics, and other high processing load materials.
The bridge-type frame structure and improved wafer handling system contribute to the compact size and small footprint of the DFD6361.
|Specification||Unit||1.2, 1.8 kW||2.2 kW|
|Max. workpiece size||mm||Φ300|
|Cutting speed||mm/s||0.1 ～ 600|
|Positioning accuracy||mm||Within 0.002/310
(Single error) Within 0.002/5
|Z-axis||Max. stroke||mm||14.7 (For Φ2 inch blade)||14.9（For Φ3 inch blade）|
|θ-axis||Max. rotating angle||deg||380|
|Spindle||Rated torque||N・m||0.19（1.2 kW）
|Rotation speed range||min‐1||6,000 ～ 60,000||3,000 ～ 30,000|
|Equipment dimensions(W×D×H)||mm||1,200 × 1,550 × 1,800|
|Equipment weight||kg||Approx. 2,050|
*Product appearance, features, specifications, and other details may change due to technical
*Please read the standard specification sheet thoroughly before use.
|Machine dimentions（W × D × H）|
|Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic||Fully Automatic|
|900 × 1,190 × 1,800||1,180 × 1,110 × 1,850||1,180 × 1,080 × 1,820||1,180 × 1,080 × 1,820||1,200 × 1,550 × 1,800||1,200 × 1,550 × 1,800||1,120 × 1,500 × 1,600||1,240 × 1,550 × 1,960||1,240 × 1,550 × 1,800||1,510 × 1,554 × 1,800||1,200 × 1,900 × 1,800|