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ZHFX Series

ZHFX Series
The ZHFX Series employs a bond that has ideal wear properties for processing newly developed oxide wafers. It is capable of continuously processing oxide wafers, which has been difficult thus far, with a high level with stability. In addition, greater processing stability can be expected in the DBG processing of Lithium Tantalite wafers.

  • Realizes high level and stable processing of oxide wafers
  • Significantly lowers dress frequency during processing and shows high continuous processing performance.
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ZHFX Series Catalog
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