Applications: Silicon wafer, Compound semiconductor wafers (GaAs, GaP, etc.), etc
ZHZZ series hub blades were developed with a focus on narrow street dicing and other processing methods that use thin blades. Adopting the H1 bond, which has high rigidity, reduces blade breakage and wavy cutting for thin kerfs and enables stable processing. The lineup includes a 10 µm wide blade that is the thinnest in the industry, contributing to the drive for narrower streets.
The ZHZZ series can produce a 10 µm kerf. This is an extremely thin blade compared to 20 to 40 µm blades, and has been proven to be able to cut straight grooves
The ZHZZ series does not exhibit wavy cutting until very high rotation speeds are reached. Compared to previous products, wavy cutting occurs less frequently.
Evaluation was performed using the tendency of wavy cutting to occur more easily at higher rotation speeds. The rotation speed was gradually increased to determine the rotation speed at which wavy cutting began to occur.
|Depth||400 µm (half cut)|
|Feed speed||90 mm/s|
ZHZZ series blades can be pushed to higher feed speeds. Only then does traditional breakage occur. This means that compared to standard blades, breakage will occur less frequently.
Evaluation was performed using the tendency of blade breakage to occur more easily at higher feed speeds. The feed speed was increased rapidly to determine the feed speed at which breakage occurred.
|Spindle revolution||35,000 min-1|
Please contact a DISCO representative with your product needs such as type, wheel size, and quantity.
When you place the first order with us, please explain application information such as materials to grind, sizes, machine, type, and other specification.
We are ready to help you to determine which is our most appropriate product type for your application.
* Due to improvements in our products, it is possible that product specifications may be changed without advanced notice.
Please confirm the product specifications with a DISCO representative.
To use these DISCO blades and wheels (hereafter precision tooling) safely
Please read carefully and follow the instructions below to prevent any accidents or injuries.